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Development of a Multiobjective Scheduler for Semiconductor Manufacturing

Azzaro-Pantel, Catherine and Baez Senties, Oscar and Domenech, Serge and Pibouleau, Luc Development of a Multiobjective Scheduler for Semiconductor Manufacturing. (2006) In: 16th European Symposium on Computer Aided Process Engineering (ESCAPE 16) and 9th International Symposium on Process Systems Engineering, 17-19 July 2006 , Garmisch PartenKirschen, Allemagne .

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Abstract

Scheduling of semiconductor wafer fabrication system is identified as a complex problem, involving multiple and conflicting objectives (meeting due dates and minimizing waiting time for instance) to satisfy. In this study, we propose an effective approach based an artificial neural network technique embedded in a multiobjective optimization loop for multi-decision scheduling problems in a semiconductor wafer fabrication environment.

Item Type:Conference or Workshop Item (Speech)
Audience (conference):International conference proceedings
Uncontrolled Keywords:
Institution: Université de Toulouse > Institut National Polytechnique de Toulouse - INPT
Université de Toulouse > Université Paul Sabatier-Toulouse III - UPS
French research institutions > Centre National de la Recherche Scientifique - CNRS
Laboratory name:
Laboratoire de Génie Chimique - LGC (Toulouse, France) - Procédés Systèmes Industriels (PSI)
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Deposited By:Guylène Abadie

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