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High performance thin film bulk acoustic resonator covered with carbon nanotubes

Dragoman, Mircea and Muller, Alexandru and Neculoiu, Dan and Vasilache, Dan-Adrian and Konstantinidis, George and Grenier, Katia and Dubuc, David and Bary, Laurent and Plana, Robert and Flahaut, Emmanuel High performance thin film bulk acoustic resonator covered with carbon nanotubes. (2006) Applied Physics Letters, vol. 89 . pp. 143122-1. ISSN 0003-6951

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Official URL: http://dx.doi.org/10.1063/1.2358838

Abstract

This letter presents experimental results concerning a thin film bulk acoustic wave resonator realized on a thin GaN membrane and covered with a thin film of double walled carbon nanotube mixture. The quality factor was measured before and after the coating of the resonator with the nanotube thin film. The quality factor has increased more than ten times when the resonator was coated with nanotubes, due to their high elasticity modulus and low density, which confers a much higher acoustic impedance of the resonator electrodes and thus confines much better the longitudinal acoustic standing waves inside the resonator.

Item Type:Article
Additional Information:Thanks to American Institute of Physics editor. The definitive version is available at http://scitation.aip.org The original PDF of the article can be found at Applied Physics Letters website :http://apl.aip.org/apl/top.jsp
Audience (journal):International peer-reviewed journal
Uncontrolled Keywords:
Institution:Other partners > Foundation for Research and Techonology Hellas – FORTH (GREECE)
Université de Toulouse > Institut National Polytechnique de Toulouse - INPT
Université de Toulouse > Université Paul Sabatier-Toulouse III - UPS
Université de Toulouse > Institut National des Sciences Appliquées de Toulouse - INSA
Other partners > National Research and Development Institute in Microtechnology - IMT (ROMANIA)
French research institutions > Centre National de la Recherche Scientifique - CNRS
Laboratory name:
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Deposited By: Celine Cabaup
Deposited On:18 Jun 2009 07:03

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