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Thermal behaviour of CpCuPEt3 in gas phase and Cu thin films processing

Senocq, François and Turgambaeva, Assia and Prud’homme, Nathalie and Patil, Urmila and Krisyuk, Vladislav and Samélor, Diane and Gleizes, Alain and Vahlas, Constantin Thermal behaviour of CpCuPEt3 in gas phase and Cu thin films processing. (2007) Surface and Coatings Technology, vol. 201 (n° 22 - 23). pp. 9131-9134. ISSN 0257-8972

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Official URL: http://dx.doi.org/10.1016/j.surfcoat.2007.05.011

Abstract

Decomposition of CpCuPEt3 (Cp=NNN(η5-C5H5)) and MOCVD of Cu films from CpCuPEt3 have been investigated in the frame of an ongoing project on the processing of Cu-containing coatings. The behaviour of CpCuPEt3 vapours under heating conditions was studied by in situ mass spectrometry. It was established that this compound is monomeric in gas phase. Its decomposition mechanism on hot surface was proposed. From mass spectroscopy experiments, it was established that decomposition in vacuum begins at 150 °C with evolution of PEt3. Beyond 270 °C, formation of cyclopentadiene is observed, indicating that a change in decomposition mechanism occurs. The saturating vapour pressure of CpCuPEt3 was estimated through static method, in order to optimize transport conditions and to control the molar fraction of the precursor in the gas phase. Finally, growth rate and microstructure of MOCVD processed Cu films from CpCuPEt3 have been investigated.

Item Type:Article
Additional Information:Thanks to Elsevier editor. The definitive version is available at http://www.sciencedirect.com The original PDF of the article can be found at Surface and Coatings Technology website : http://www.sciencedirect.com/science/journal/02578972
Audience (journal):International peer-reviewed journal
Uncontrolled Keywords:
Institution: Université de Toulouse > Institut National Polytechnique de Toulouse - INPT
Université de Toulouse > Université Paul Sabatier-Toulouse III - UPS
Other partners > Siberian Branch of the Russian Academy of Sciences (RUSSIA)
French research institutions > Centre National de la Recherche Scientifique - CNRS
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Deposited By:Celine Cabaup

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