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Thermodynamic simulation of atmospheric DLI-CVD processes for the growth of chromium-based hard coatings using bis(benzene)chromium as molecular source

Douard, Aurélia and Bernard, C. and Maury, Francis Thermodynamic simulation of atmospheric DLI-CVD processes for the growth of chromium-based hard coatings using bis(benzene)chromium as molecular source. (2008) Surface and Coatings Technology, vol. 203 (n° 5 - 7). pp. 516-520. ISSN 0257-8972

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Official URL: http://dx.doi.org/10.1016/j.surfcoat.2008.07.013

Abstract

Direct liquid injection (DLI) is a new technology particularly convenient for feeding CVD reactors with low volatility molecular precursors. Thus DLI-CVD can operate under atmospheric pressure and is a promising process for industrial applications requiring high precursor flow rates such as continuous deposition. In order to help the experimenter, a thermodynamic approach is particularly suitable for determining the chemistry of the process, i.e. the influence of the main growth parameters such as temperature, total pressure and initial gas phase composition on the nature of the deposited phases. A choice of the most explicit representations of the thermodynamic modelling describing the great trends resulting from the variation of experimental parameters is presented. Thermodynamic calculations in the Cr–C–H, Cr–N–C–H and Cr–C–Cl–H chemical systems were made to predict the atmospheric CVD growth of carbides, nitrides andmetal chromium coatings, respectively. Bis(benzene)chromium (BBC) was used as metalorganic precursor and the calculations simulated respectively the reactive gas phase mixtures BBC/solvent, BBC/NH3/solvent and BBC/C6Cl6/solvent. Even if a satisfactory agreement was found between experimental and theoretical tendencies, the deposition of metastable phases reveals that kinetics can play amajor role in such processes. Based on these results, chromium carbides, nitrides and metal coatings have been successfully deposited by DLI-CVD under atmospheric pressure either as single phased or nanostructured multilayer hard coatings.

Item Type:Article
Additional Information:Thanks to Elsevier editor. The definitive version is available at http://www.sciencedirect.com The original PDF of the article can be found at Surface and Coatings Technology website : http://www.sciencedirect.com/science/journal/02578972
Audience (journal):International peer-reviewed journal
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Institution: Université de Toulouse > Institut National Polytechnique de Toulouse - INPT
Other partners > Institut National Polytechnique de Grenoble (FRANCE)
Université de Toulouse > Université Paul Sabatier-Toulouse III - UPS
Other partners > Université Joseph Fourier Grenoble 1 - UJF (FRANCE)
French research institutions > Centre National de la Recherche Scientifique - CNRS
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Deposited By:Celine Cabaup

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