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Solvent free method for intense vaporization of solid molecular and inorganic compounds

Vahlas, Constantin and Guillon, Hervé and Senocq, François and Caussat, Brigitte and Bonnafous, Samuel Solvent free method for intense vaporization of solid molecular and inorganic compounds. (2009) Gases & Instrumentation . pp. 8-11.

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Official URL: http://www.gasesmag.com/articles.php?pid=56

Abstract

New tools have been developed for vaporization of solid precursors to meet the demands of high feed rate for CVD, ALD and other deposition processes.

Item Type:Article
Additional Information:Originally published by Gases & Instrumentation International Magazine, Vol.3, Issue 1, January/February 2009 (www.gasesmag.com)
Audience (journal):International journal (no peer-reviewed)
Uncontrolled Keywords:
Institution:Other partners > KEMSTREAM (FRANCE)
Université de Toulouse > Institut National Polytechnique de Toulouse - INPT
Université de Toulouse > Université Paul Sabatier-Toulouse III - UPS
French research institutions > Centre National de la Recherche Scientifique - CNRS
Laboratory name:
Statistics:download
Deposited By:Brigitte CAUSSAT-BONNANS

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