Vahlas, Constantin and Guillon, Hervé and Senocq, François and Caussat, Brigitte and Bonnafous, Samuel Solvent free method for intense vaporization of solid molecular and inorganic compounds. (2009) Gases & Instrumentation . pp. 8-11.
![[img]](http://oatao.univ-toulouse.fr/style/images/fileicons/application_pdf.png)
| (Document in English) PDF (Publisher's version) - Requires a PDF viewer such as GSview, Xpdf or Adobe Acrobat Reader 2895Kb |
Official URL: http://www.gasesmag.com/articles.php?pid=56
Abstract
New tools have been developed for vaporization of solid precursors to meet the demands of high feed rate for CVD, ALD and other deposition processes.
| Item Type: | Article |
|---|---|
| Additional Information: | Originally published by Gases & Instrumentation International Magazine, Vol.3, Issue 1, January/February 2009 (www.gasesmag.com) |
| Audience (journal): | International journal (no peer-reviewed) |
| Uncontrolled Keywords: | |
| Institution: | Other partners > KEMSTREAM (FRANCE) Université de Toulouse > Institut National Polytechnique de Toulouse - INPT Université de Toulouse > Université Paul Sabatier-Toulouse III - UPS French research institutions > Centre National de la Recherche Scientifique - CNRS |
| Laboratory name: | Centre Interuniversitaire de Recherche et d'Ingénierie des Matériaux - CIRIMAT (Toulouse, France) Laboratoire de Génie Chimique - LGC (Toulouse, France) - Génie des Interfaces & Milieux Divisés (GIMD) - CVD |
| Statistics: | download |
| Deposited By: | Brigitte CAUSSAT-BONNANS |
Repository Staff Only: item control page
