VCSEL intrinsic response extraction using T-Matrix formalism

Abstract

We present a new method to remove the parasitics contribution to the VCSEL chip response, in order to obtain the intrinsic S21 behavior. The on-chip VCSEL is defined as two cascaded two-port subsystems representing the electrical access and the VCSEL optical cavity respectively. S11 and S21 parameters measurements are carried-out using a probe station to characterize the chip response. An electrical equivalent circuit defining the behavior of the electrical access is combined with T-Matrix formalism to remove the parasitics contribution from the measured S21 response. Results allow us to determine the intrinsic 3-dB bandwidth of the VCSEL.