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Detailed investigation of the surface mechanisms and their interplay with transport phenomena in alumina atomic layer deposition from TMA and water

Gakis, Giorgos and Vergnes, Hugues and Scheid, Emmanuel and Vahlas, Constantin and Boudouvis, Andreas G. and Caussat, Brigitte Detailed investigation of the surface mechanisms and their interplay with transport phenomena in alumina atomic layer deposition from TMA and water. (2018) Chemical Engineering Science. ISSN 0009-2509

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Official URL: https://doi.org/10.1016/j.ces.2018.09.037

Abstract

The surface mechanisms involved in the Atomic Layer Deposition of Al2O3 from TMA and H2O are investigated by means of combined experimental and computational analyses. Reactant adsorption, desorption and surface reaction are taken into account by a surface chemistry model, coupled to a CFD model for an industrial reactor treating 200 mm substrates. Once the model validated by comparison with experimental deposition rates, the relative contribution of each surface phenomenon is quantitatively determined between 100 and 300 °C through original reaction probability calculations. It is revealed that the competition between surface reactions and desorption of adsorbed H2O plays a crucial role in the ALD growth of alumina. The H2O desorption is the limiting factor for the growth at low process temperature whereas it is the OH group surface concentration at higher temperature. This integrated (surface chemistry/kinetics and CFD) model shows a direct link between transport phenomena, such as gas flow recirculation and low temperature zones in the reactor, and film uniformity.

Item Type:Article
Audience (journal):International peer-reviewed journal
Uncontrolled Keywords:
Institution:French research institutions > Centre National de la Recherche Scientifique - CNRS (FRANCE)
Université de Toulouse > Institut National Polytechnique de Toulouse - INPT (FRANCE)
Université de Toulouse > Institut National des Sciences Appliquées de Toulouse - INSA (FRANCE)
Other partners > National Technical University of Athens - NTUA (GREECE)
Université de Toulouse > Université Toulouse III - Paul Sabatier - UPS (FRANCE)
Laboratory name:
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Deposited By: Loetitia MOYA
Deposited On:03 Dec 2018 15:24

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