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Highly Sensitive Sputtered ZnO:Ga Thin Films Integrated by a Simple Stencil Mask Process on Microsensor Platforms for Sub-ppm Acetaldehyde Detection

Presmanes, Lionel and Thimont, Yohann and Chapelle, Audrey and Blanc, Frédéric and Talhi, Chabane and Bonningue, Corine and Barnabé, Antoine and Menini, Philippe and Tailhades, Philippe Highly Sensitive Sputtered ZnO:Ga Thin Films Integrated by a Simple Stencil Mask Process on Microsensor Platforms for Sub-ppm Acetaldehyde Detection. (2017) Sensors, 17 (5). 1-12. ISSN 1424-8220

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Official URL: https://dx.doi.org/10.3390/s17051055

Abstract

The integration of a 50-nm-thick layer of an innovative sensitive material on microsensors has been developed based on silicon micro-hotplates. In this study, integration of ZnO:Ga via radio-frequency (RF) sputtering has been successfully combined with a low cost and reliable stencil mask technique to obtain repeatable sensing layers on top of interdigitated electrodes. The variation of the resistance of this n-type Ga-doped ZnO has been measured under sub-ppm traces (500 ppb) of acetaldehyde (C2H4O). Thanks to the microheater designed into a thin membrane, the generation of very rapid temperature variations (from room temperature to 550° C in 25 ms) is possible, and a rapid cycled pulsed-temperature operating mode can be applied to the sensor. This approach reveals a strong improvement of sensing performances with a huge sensitivity between 10 and 1000, depending on the working pulsed-temperature level.

Item Type:Article
Additional Information:Thanks to Basel, Switzerland editor. The original PDF of the article can be found at Sensors website : http://www.mdpi.com/1424-8220/17/5/1055
HAL Id:hal-01759300
Audience (journal):International peer-reviewed journal
Uncontrolled Keywords:
Institution:French research institutions > Centre National de la Recherche Scientifique - CNRS (FRANCE)
Université de Toulouse > Institut National Polytechnique de Toulouse - INPT (FRANCE)
Université de Toulouse > Institut National des Sciences Appliquées de Toulouse - INSA (FRANCE)
Université de Toulouse > Université Toulouse III - Paul Sabatier - UPS (FRANCE)
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Deposited By: cirimat webmestre
Deposited On:05 Apr 2018 10:25

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