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Computational fluid dynamics simulation of the ALD of alumina from TMA and H2O in a commercial reactor

Gakis, Giorgos and Vergnes, Hugues and Scheid, Emmanuel and Vahlas, Constantin and Caussat, Brigitte and Boudouvis, Andreas G. Computational fluid dynamics simulation of the ALD of alumina from TMA and H2O in a commercial reactor. (2018) Chemical Engineering Research and Design, 132. 795-811. ISSN 0263-8762

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Official URL: http://dx.doi.org/10.1016/j.cherd.2018.02.031

Abstract

A three-dimensional Computational Fluid Dynamics model is built for a commercial Atomic Layer Deposition (ALD) reactor, designed to treat large area 20 cm substrates. The model aims to investigate the effect of the reactor geometry and process parameters on the gas flow and temperature fields, and on the species distribution on the heated substrate surface, for the deposition of Al2O3 films from trimethyl aluminum and H2O. The investigation is performed in transient conditions, without considering any surface reaction. A second CFD model is developed for the feeding system of the reactor, in order to calculate the unknown reactant inlet flow rates. The two models are coupled via a computational strategy dictated by the available experimental measurements. Results show that a purging flow entering the reactor through its loading door affects the flow field above the substrate surface and causes non-uniformity in the temperature and reactants concentration on the substrate surface. During the TMA pulse, a recirculation sets in above the substrate surface, leading to a non-uniform distribution of species on the surface.

Item Type:Article
Additional Information:Thanks to Elsevier editor. The original PDF of the article can be found : https://www.sciencedirect.com/science/article/pii/S0263876218300960
HAL Id:hal-01730196
Audience (journal):International peer-reviewed journal
Uncontrolled Keywords:
Institution:French research institutions > Centre National de la Recherche Scientifique - CNRS (FRANCE)
Université de Toulouse > Institut National Polytechnique de Toulouse - INPT (FRANCE)
Other partners > National Technical University of Athens - NTUA (GREECE)
Université de Toulouse > Université Toulouse III - Paul Sabatier - UPS (FRANCE)
Laboratory name:
Funders:
Toulouse Tech Inter Lab 2016
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Deposited By: Brigitte CAUSSAT-BONNANS
Deposited On:13 Mar 2018 08:34

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