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Investigation of reaction mechanisms in the chemical vapor deposition of al from DMEAA

Psarellis, George M. and Aviziotis, Ioannis G. and Duguet, Thomas and Vahlas, Constantin and Koronaki, Eleni D. and Boudouvis, Andreas G. Investigation of reaction mechanisms in the chemical vapor deposition of al from DMEAA. (2018) Chemical Engineering Science, 177. 464-470. ISSN 0009-2509

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Official URL: http://dx.doi.org/10.1016/j.ces.2017.12.006

Abstract

We propose a novel reaction scheme for the chemical vapor deposition (CVD) of Al films on substrates from dimethylethylamine alane (DMEAA), supported by the prediction of the Al deposition rate as a function of process temperature. The scheme is based on gas phase oligomerizations of alane which form a substantial amount of intermediates. Combined with reversible surface dehydrogenation steps, the global deposition reaction is composed of a set of 12 chemical reactions. This new scheme entails four intermediates and includes side reactions that play an important role in the formation of Al thin films. The chemistry mechanism is incorporated in a 2D Computational Fluid Dynamics (CFD) model of the CVD reactor setup used for the experimental investigation. The simulation predictions of the Al deposition rate are in good agreement with corresponding experimental measurements. The success of this novel reaction pathway lies in its ability to capture the abrupt decrease of the deposition rate at temperatures above 200 °C, which is attributed to the gas phase consumption of alane along with its increased desorption rate from the film surface.

Item Type:Article
Additional Information:Thanks to Elsevier editor. The original PDF of the article can be found at http://www.sciencedirect.com/science/article/pii/S0009250917307431
HAL Id:hal-01722751
Audience (journal):International peer-reviewed journal
Uncontrolled Keywords:
Institution:French research institutions > Centre National de la Recherche Scientifique - CNRS (FRANCE)
Université de Toulouse > Institut National Polytechnique de Toulouse - INPT (FRANCE)
Other partners > National Technical University of Athens - NTUA (GREECE)
Université de Toulouse > Université Toulouse III - Paul Sabatier - UPS (FRANCE)
Laboratory name:
Funders:
National Scholarship Foundation of Greece - Institut Français du Petrole et des Energies Nouvelles
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Deposited By: Diane SAMELOR
Deposited On:20 Dec 2017 10:06

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