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Fault prognostics of micro-electro-mechanical systems using particle filtering

Skima, Haithem and Medjaher, Kamal and Varnier, Christophe and Dedu, Eugen and Bourgeois, Julien and Zerhouni, Noureddine Fault prognostics of micro-electro-mechanical systems using particle filtering. (2016) In: IFAC AMEST 2016, 19 October 2016 - 21 October 2016 (Biarritz, France).

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Official URL: https://doi.org/10.1016/j.ifacol.2016.11.039

Abstract

This paper presents a hybrid prognostics approach for Micro-Electro-Mechanical Systems (MEMS). The approach relies on two phases: an offline phase for the MEMS and its degradation modeling, and an online phase for its fault prognostics. The proposed approach is applied to a MEMS device consisting in an electro-thermally actuated valve. In the offline phase, an experimental platform is built to validate the obtained nominal behavior model of the targeted MEMS and to get its degradation model. This model represents the drifts in a MEMS physical parameter, which is its compliance. In the online phase, a particle filter algorithm is used to perform online parameters estimation of the derived degradation model and calculate the MEMS remaining useful life. The obtained prognostic results show the effectiveness of the proposed approach.

Item Type:Conference or Workshop Item (Paper)
Additional Information:Thanks to IFAC-PapersOnline editor. The definitive version is available at : https://www.sciencedirect.com/journal/ifac-papersonline
HAL Id:hal-01977370
Audience (conference):International conference proceedings
Uncontrolled Keywords:
Institution:French research institutions > Centre National de la Recherche Scientifique - CNRS (FRANCE)
Other partners > Ecole Nationale Supérieure de Mécanique et des Microtechniques - ENSMM (FRANCE)
Université de Toulouse > Institut National Polytechnique de Toulouse - INPT (FRANCE)
Other partners > Université de Franche-Comté (FRANCE)
Other partners > Université de Technologie de Belfort-Montbéliard - UTBM (FRANCE)
Laboratory name:
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Deposited By: Kamal Medjaher
Deposited On:06 Dec 2017 08:47

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