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Integration of nanostructured planar diffractive lenses dedicated to near infrared detection for CMOS image sensors

Lopez, Thomas and Massenot, Sébastien and Estribeau, Magali and Magnan, Pierre and Pardo, Fabrice and Pelouard, Jean-Luc Integration of nanostructured planar diffractive lenses dedicated to near infrared detection for CMOS image sensors. (2016) Optics Express, 24 (8). 8809-8823. ISSN 1094-4087

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Official URL: http://dx.doi.org/10.1364/OE.24.008809

Abstract

This paper deals with the integration of metallic and dielectric nanostructured planar lenses into a pixel from a silicon based CMOS image sensor, for a monochromatic application at 1.064 μm. The first is a Plasmonic Lens, based on the phase delay through nanoslits, which has been found to be hardly compatible with current CMOS technology and exhibits a notable metallic absorption. The second is a dielectric Phase-Fresnel Lens integrated at the top of a pixel, it exhibits an Optical Efficiency (OE) improved by a few percent and an angle of view of 50°. The third one is a metallic diffractive lens integrated inside a pixel, which shows a better OE and an angle of view of 24°. The last two lenses exhibit a compatibility with a spectral band close to 1.064 μm.

Item Type:Article
Additional Information:Thanks to Optical Society of Americaeditor. The definitive version is available at https://www.osapublishing.org/oe/abstract.cfm?uri=oe-24-8-8809
Audience (journal):International peer-reviewed journal
Uncontrolled Keywords:
Institution:French research institutions > Centre National de la Recherche Scientifique - CNRS (FRANCE)
Université de Toulouse > Institut Supérieur de l'Aéronautique et de l'Espace - ISAE-SUPAERO (FRANCE)
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Deposited By: Massenot Sébastien
Deposited On:29 Sep 2017 13:27

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