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Experimental investigation and CFD-based analysis of an ALD reactor depositing alumina from TMA and water

Gakis, Giorgos and Vergnes, Hugues and Scheid, Emmanuel and Boudouvis, Andreas G. and Vahlas, Constantin and Caussat, Brigitte Experimental investigation and CFD-based analysis of an ALD reactor depositing alumina from TMA and water. (2017) In: EuroCVD 21 - Baltic ALD 15 Conference, 11 June 2017 - 14 June 2017 (Linköping, Sweden). (Unpublished)

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Abstract

Numerous experiments of alumina deposition using trimethyl aluminum (TMA, Al(CH3)3) and water vapor (H2O) as precursors and argon as inert gas have been performed in a commercial Cambridge Nanotech® ALD reactor. As illustrated in Fig. 1, they show that even for established recipes, the thickness variation of the deposit reaches 2.5 to 3% on a 8’ silicon wafer substrate after 500 ALD cycles, and a clear influence of the reactor geometry appears, in particular for the loading door. The influence of the loading door is due to an argon flow inlet suggested as presumably optimized by the manufacturer of the machine. A three-dimensional Computational Fluid Dynamics (CFD) model is developed, in order to investigate the various phenomena involved and aiming at improving the deposit uniformity. The model comprises two sub-models: one for the precursor feeding system, to compensate for the lack of measurements of the reactants inlet flows into the reactor; the other for treating the reactant pulses of the ALD cycle in the reactor.

Item Type:Conference or Workshop Item (Poster)
Audience (conference):International conference without published proceedings
Uncontrolled Keywords:
Institution:French research institutions > Centre National de la Recherche Scientifique - CNRS (FRANCE)
Université de Toulouse > Institut National Polytechnique de Toulouse - INPT (FRANCE)
Université de Toulouse > Institut National des Sciences Appliquées de Toulouse - INSA (FRANCE)
Other partners > National Technical University of Athens - NTUA (GREECE)
Université de Toulouse > Université Toulouse III - Paul Sabatier - UPS (FRANCE)
Université de Toulouse > Université Toulouse - Jean Jaurès - UT2J (FRANCE)
Université de Toulouse > Université Toulouse 1 Capitole - UT1 (FRANCE)
Laboratory name:
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Deposited By: Brigitte CAUSSAT-BONNANS
Deposited On:27 Oct 2017 12:04

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