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Comparison of Pinning Voltage Estimation Methods in Pinned Photodiode CMOS Image Sensors

Pelamatti, Alice and Goiffon, Vincent and De Ipanema Moreira, Alexis and Magnan, Pierre and Virmontois, Cédric and Saint-Pé, Olivier and Breart de Boisanger, Michel Comparison of Pinning Voltage Estimation Methods in Pinned Photodiode CMOS Image Sensors. (2016) IEEE Journal of the Electron Devices Society, vol. 4 (n° 2). pp. 99-108. ISSN 2168-6734

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Official URL: http://dx.doi.org/10.1109/JEDS.2015.2509606

Abstract

The pinning voltage is a key design parameter in Pinned Photodiode CMOS Image Sensors which significantly affects the device performances and which is often used by manufacturers to monitor production lines and for the optimization of technological processes. This work presents a comparative study of pinning voltage estimation methods, which are based both on electrical measurements performed on isolated test structures (or on test structures arrays) and on in-pixel measurements. It is shown, with the support of simulations and experimental measurements, that not all the estimation methods provide an absolute value of the pinning voltage. Moreover, this work demonstrates that the commonly accepted theoretical definition of the pinning voltage does not correspond to the physical parameter which is measured with the existing methods.

Item Type:Article
Additional Information:Thanks to the IEEE (Institute of Electrical and Electronics Engineers). This paper is available at : http://ieeexplore.ieee.org/xpl/RecentIssue.jsp?punumber=6245494 “© 2016 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
HAL Id:hal-01420126
Audience (journal):International peer-reviewed journal
Uncontrolled Keywords:
Institution:Other partners > Airbus (FRANCE)
French research institutions > Centre National des Etudes Spatiales - CNES (FRANCE)
Université de Toulouse > Institut Supérieur de l'Aéronautique et de l'Espace - ISAE-SUPAERO (FRANCE)
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Deposited By: Alice Pelamatti
Deposited On:20 Dec 2016 11:31

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