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Multiscale modeling and experimental analysis of chemical vapor deposited aluminum films : Linking reactor operating conditions with roughness evolution

Aviziotis, Ioannis G. and Cheimarios, Nikolaos and Duguet, Thomas and Vahlas, Constantin and Boudouvis, Andreas G. Multiscale modeling and experimental analysis of chemical vapor deposited aluminum films : Linking reactor operating conditions with roughness evolution. (2016) Chemical Engineering Science, 155. 449-458. ISSN 0009-2509

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Official URL: http://dx.doi.org/10.1016/j.ces.2016.08.039

Abstract

When composition and crystallographic structure remainconstant, film properties mainly depend on microstructure and surface morphology. In this case,the proper modeling of agrowing film allows linking the final surface features with the operating conditions at the reactor scale which in turn enables the control of theproperties of the final film. In this work, an experimentally supported,coarse-grained, multiscale framework is applied for the modeling of the surface roughness of aluminum thin films processed by chemical vapor deposition from dimethylethylaminealane. The multiscale framework is developed by linking macroscopic transport phenomena based on continuum mechanics models with nanoscale surface events which are simulated stochastically. The model reproduces experimentaldata successfully,thus validating the method with good statistics. Finally,modeling of surface roughness enables the estimation of the electrical resistivity in good agreement with corresponding measurements.

Item Type:Article
Additional Information:Thanks to Elsevier editor. The definitive version is available at http://www.sciencedirect.com The original PDF of the article can be found at Chemical Engineering Science website : http://www.sciencedirect.com/science/article/pii/S0009250916304754
HAL Id:hal-01412001
Audience (journal):International peer-reviewed journal
Uncontrolled Keywords:
Institution:French research institutions > Centre National de la Recherche Scientifique - CNRS (FRANCE)
Université de Toulouse > Institut National Polytechnique de Toulouse - INPT (FRANCE)
Other partners > National Technical University of Athens - NTUA (GREECE)
Université de Toulouse > Université Toulouse III - Paul Sabatier - UPS (FRANCE)
Other partners > Scienomics (FRANCE)
Laboratory name:
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Deposited By: Diane SAMELOR
Deposited On:08 Sep 2016 14:06

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