OATAO - Open Archive Toulouse Archive Ouverte Open Access Week

A Process-Structure Investigation of Aluminum Oxide and Oxycarbide Thin Films prepared by Direct Liquid Injection CVD of Dimethylaluminum Isopropoxide (DMAI)

Baggetto, Loïc and Charvillat, Cédric and Esvan, Jérôme and Thébault, Yannick and Samélor, Diane and Vergnes, Hugues and Caussat, Brigitte and Gleizes, Alain and Vahlas, Constantin A Process-Structure Investigation of Aluminum Oxide and Oxycarbide Thin Films prepared by Direct Liquid Injection CVD of Dimethylaluminum Isopropoxide (DMAI). (2015) Chemical Vapor Deposition, vol.21 (n°10,11,12). pp.343-351. ISSN 0948-1907

[img] (Document in English)

PDF (Author's version) - Depositor and staff only - Requires a PDF viewer such as GSview, Xpdf or Adobe Acrobat Reader
1MB

Official URL: http://dx.doi.org/10.1002/cvde.201507190

Abstract

We present the direct liquid injectionCVDof aluminum oxide and oxycarbide thin films using dimethylaluminum isopropoxide at high process temperature (500–700 8C) with the addition ofO2 gas, and at low temperature (150–300 8C) with the addition of H2O vapor. Very smooth films with typical roughness values lower than 2 nm are obtained. The thin films are composed of an amorphous material. The composition evolves as a function of temperature from that of a partial hydroxide to a stoichiometric oxide at low deposition temperature(150–300 8C), and from that of a stoichiometric oxide to a mixture of an oxide with an(oxy)carbide at higher temperature (500–700 8C).

Item Type:Article
Additional Information:Thanks to Wiley editor. The definitive version is available at http://onlinelibrary.wiley.com/journal/10.1002/(ISSN)1521-3862 The original PDF of the article can be found at Chemical Vapor Deposition website : http://onlinelibrary.wiley.com/doi/10.1002/cvde.201507190/full
Audience (journal):International peer-reviewed journal
Uncontrolled Keywords:
Institution:French research institutions > Centre National de la Recherche Scientifique - CNRS (FRANCE)
Université de Toulouse > Institut National Polytechnique de Toulouse - INPT (FRANCE)
Université de Toulouse > Université Toulouse III - Paul Sabatier - UPS (FRANCE)
Laboratory name:
Statistics:download
Deposited By: Diane SAMELOR
Deposited On:11 Jan 2016 14:30

Repository Staff Only: item control page