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Temperature Dependent 4-, 5- and 6-Fold Coordination of Aluminum in MOCVD-Grown Amorphous Alumina Films: From Local Coordination to Material Properties

Gleizes, Alain and Samélor, Diane and Vahlas, Constantin and Sarou-Kanian, Vincent and Florian, Pierre and Massiot, Dominique Temperature Dependent 4-, 5- and 6-Fold Coordination of Aluminum in MOCVD-Grown Amorphous Alumina Films: From Local Coordination to Material Properties. (2014) Advances in Science and Technology, 91. 123-133. ISSN 1662-8969

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Official URL: http://dx.doi.org/10.4028/www.scientific.net/AST.91.123

Abstract

Aluminum 5-fold coordination coexisting with 4-and 6-fold coordination structurally characterizes amorphous aluminum oxide. For nearly 30 years now, 27Al MAS NMR has enabled to detect and later on to quantify this feature thanks to advances in high-resolution instrumentation. The Introduction shortly reviews the results of investigations of 5-coordinate aluminum in amorphous alumina through NMR analysis. Aluminum oxide is not a glass-forming oxide. A convenient way to obtain the amorphous state is by thin film deposition. We present here 27Al NMR analysis of a series of thin films of aluminum oxide prepared by metalorganic chemical vapor deposition (MOCVD) in the temperature range 360 ≤ Td ≤ 720 °C. In this range, low Td yield OH-containing films, while high Td yield nanocrystallites-containing films. The variation of the [4]Al, [5]Al and [6]Al content with Td is presented and discussed. It is correlated with the Td dependence of mechanical and corrosion protection properties. These properties are optimal when the structural disorder is to the utmost. Al coordination dependence on film thickness and the formation of metallic aluminum during the deposition process are also presented.

Item Type:Article
Additional Information:Thanks to Trans Tech Publications. The definitive version is available at http://www.scientific.net The original PDF of the article can be found at : http://www.scientific.net/AST.91.123
HAL Id:hal-01169598
Audience (journal):International peer-reviewed journal
Uncontrolled Keywords:
Institution:French research institutions > Centre National de la Recherche Scientifique - CNRS (FRANCE)
Université de Toulouse > Institut National Polytechnique de Toulouse - INPT (FRANCE)
Université de Toulouse > Université Toulouse III - Paul Sabatier - UPS (FRANCE)
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Deposited By: Diane SAMELOR
Deposited On:29 Jun 2015 15:49

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