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Study of SU-8 reliability in wet thermal ambient for application to polymer micro-optics on VCSELs

Reig, Benjamin and Bardinal, Véronique and Doucet, Jean-Baptiste and Daran, Emmanuelle and Camps, Thierry and Aufray, Maëlenn and Lamure, Alain and Tendero, Claire Study of SU-8 reliability in wet thermal ambient for application to polymer micro-optics on VCSELs. (2014) Japanese Journal of Applied Physics, 53 (8S2). 08MC03-1. ISSN 0021-4922

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Official URL: http://dx.doi.org/10.7567/JJAP.53.08MC03

Abstract

We present experimental data on the reliability of SU-8 polymer when used as a core material for the integration of microlenses on vertical-cavity surface-emitting lasers (VCSELs). The respective effects of a hot and humid environment on structural, mechanical and optical properties of this epoxy resist are investigated. High aspect-ratio SU-8 micropillars are found to keep a good surface morphology and a stable optical transmission, as well as a good adherence on the wafer. Thermal cycling is also studied to check material stability under electro-thermal actuation in SU-8 micro-opto-electro-mechanical system (MOEMS). These results are of great importance for the collective integration of low-cost SU-8-based passive or active microlens arrays onto VCSELs wafers for optical interconnects and optical sensing applications.

Item Type:Article
Additional Information:The copyright of this paper belongs to the Japan Society of Applied Physics. The definitive version is available at http://jjap.jsap.jp The original PDF of the article can be found at Japanese Journal of Applied Physics website : http://iopscience.iop.org/1347-4065/53/8S2/08MC03/
HAL Id:hal-01103136
Audience (journal):International peer-reviewed journal
Uncontrolled Keywords:
Institution:French research institutions > Centre National de la Recherche Scientifique - CNRS (FRANCE)
Université de Toulouse > Institut National Polytechnique de Toulouse - INPT (FRANCE)
Université de Toulouse > Institut National des Sciences Appliquées de Toulouse - INSA (FRANCE)
Université de Toulouse > Université Toulouse III - Paul Sabatier - UPS (FRANCE)
Université de Toulouse > Université Toulouse - Jean Jaurès - UT2J (FRANCE)
Université de Toulouse > Université Toulouse 1 Capitole - UT1 (FRANCE)
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Deposited By: Maelenn AUFRAY
Deposited On:14 Jan 2015 09:53

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