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A Delivery System for Precursor Vapors Based on Sublimation in a Fluidized Bed

Vahlas, Constantin and Caussat, Brigitte and Senocq, François and Gladfelter, Wayne L. and Aloui, Lyacine and Moersch, Tyler A Delivery System for Precursor Vapors Based on Sublimation in a Fluidized Bed. (2007) Chemical Vapor Deposition, vol. 1 (n° 2-3). pp. 123-129. ISSN 0948-1907

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Official URL: http://dx.doi.org/10.1002/cvde.200606513

Abstract

A fluidized-bed, solid-precursor delivery system is found to overcome the mass and heat transport problems encountered in a fixed-bed system. To achieve ideal fluidization behavior, a combination of solid precursor (minor component) and inert particles such as alumina or silica (major component) are charged to the vessel. Using [Al(acac)3] as a test precursor and operating at 423K, the rate of mass transport is measured as a function of the carrier gas flow rate. When operating at carrier gas flow rates above the minimum value required to fluidize the bed, the precursor flow rate significantly exceeds the performance of the fixed-bed system. A simple model of a solid-precursor delivery system is developed to quantify the relationship between operating conditions and gas-phase precursor flow rate. The concept of the fluidized bed, solid-precursor delivery system is validated by directing the precursor and carrier gas mixture into a CVD reactor where the flow is combined with a source of water vapor and oxygen to deposit amorphous Al2O3 films on coupons of a Ti6242 alloy.

Item Type:Article
Audience (journal):International peer-reviewed journal
Uncontrolled Keywords:
Institution: Université de Toulouse > Institut National Polytechnique de Toulouse - INPT
Université de Toulouse > Université Paul Sabatier-Toulouse III - UPS
Other partners > University of Minnesota (USA)
French research institutions > Centre National de la Recherche Scientifique - CNRS
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Deposited By:Hélène Dubernard

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