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Nanodevices for correlated electrical transport and structural investigation of individual carbon nanotubes

Sagnes, Mathieu and Broto, Jean-Marc and Raquet, Bertrand and Vieu, Christophe and Conédéra, Véronique and Dubreuil, Pascal and Ondarçuhu, Thierry and Laurent, Christophe and Flahaut, Emmanuel Nanodevices for correlated electrical transport and structural investigation of individual carbon nanotubes. (2004) Microelectronic Engineering, 73-74. 689-694. ISSN 0167-9317

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Official URL: http://dx.doi.org/10.1016/j.mee.2004.03.036

Abstract

We report a new approach to the correlation of the structural properties and the transport properties of carbon nanotubes. Through an original combination of UV lithography, custom-made photosensitive sol–gel resist and deep reactive ion etching (RIE), we have successfully integrated membrane technology and nanodevice fabrication for the electrical connection of individual carbon nanotubes. After single wall nanotube (SWNT) deposition by molecular combing and contacting using high resolution electron beam lithography, we obtain a device that allows both the investigation of the nanotubes and the contact regions by transmission electron microscopy (TEM) and the measurement of the electronic transport properties of the same individual nano-object. The whole fabrication process is detailed and the demonstration that the micro membranes are suitable for both TEM inspection and nanoelectrode fabrication is given.

Item Type:Article
Additional Information:Thanks to Elsevier editor. The definitive version is available at http://www.sciencedirect.com The original PDF of the article can be found at Microelectronic Engineering website : http://dx.doi.org/10.1016/j.mee.2004.03.036
HAL Id:hal-00945491
Audience (journal):International peer-reviewed journal
Uncontrolled Keywords:
Institution:French research institutions > Centre National de la Recherche Scientifique - CNRS (FRANCE)
Université de Toulouse > Institut National Polytechnique de Toulouse - INPT (FRANCE)
Université de Toulouse > Institut National des Sciences Appliquées de Toulouse - INSA (FRANCE)
Université de Toulouse > Institut Supérieur de l'Aéronautique et de l'Espace - ISAE-SUPAERO (FRANCE)
Université de Toulouse > Université Toulouse III - Paul Sabatier - UPS (FRANCE)
Université de Toulouse > Université Toulouse - Jean Jaurès - UT2J (FRANCE)
Université de Toulouse > Université Toulouse 1 Capitole - UT1 (FRANCE)
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Deposited By: cirimat webmestre
Deposited On:11 Dec 2013 13:02

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