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Dielectric properties of thin insulating layers measured by Electrostatic Force Microscopy

Riedel, Clément and Arinero, Richard and Tordjeman, Philippe and Ramonda, Michel and Lévêque, Gérard and Schwartz, Gustavo Ariel and De Oteyza, Dimas G. and Alegría, Angel and Colmenero, Juan Dielectric properties of thin insulating layers measured by Electrostatic Force Microscopy. (2010) The European Physical Journal Applied Physics, vol. 50 (n° 1). pp. 10501 1-10501 8. ISSN 1286-0042

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Official URL: http://dx.doi.org/10.1051/epjap/2010010

Abstract

In order to measure the dielectric permittivity of thin insulting layers, we developed a method based on electrostatic force microscopy (EFM) experiments coupled with numerical simulations. This method allows to characterize the dielectric properties of materials without any restrictions of film thickness, tip radius and tip-sample distance. The EFM experiments consist in the detection of the electric force gradient by means of a double pass method. The numerical simulations, based on the equivalent charge method (ECM), model the electric force gradient between an EFM tip and a sample, and thus, determine from the EFM experiments the relative dielectric permittivity by an inverse approach. This method was validated on a thin SiO2 sample and was used to characterize the dielectric permittivity of ultrathin poly(vinyl acetate) and polystyrene films at two temperatures.

Item Type:Article
Additional Information:Thanks to EDP Sciences editor. The definitive version is available at http://www.sciencedirect.com The original PDF of the article can be found at The European Physical Journal Applied Physics website : http://www.epjap.org/action/displayJournal?jid=JAP
HAL Id:hal-00909393
Audience (journal):International peer-reviewed journal
Uncontrolled Keywords:
Institution:French research institutions > Centre National de la Recherche Scientifique - CNRS (FRANCE)
Other partners > Donostia International Physics Center - DIPC (SPAIN)
Université de Toulouse > Institut National Polytechnique de Toulouse - INPT (FRANCE)
Université de Toulouse > Université Toulouse III - Paul Sabatier - UPS (FRANCE)
Other partners > Universidad del País Vasco - Euskal Herriko Unibertsitatea - EHU (SPAIN)
Other partners > Université de Montpellier 2 (FRANCE)
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Deposited By: Philippe TORDJEMAN
Deposited On:26 Nov 2013 09:27

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